The purpose of the invention is to provide an improved
chemicals ltd processor capable of preventing occurrence of processing failures on a surface which is to be processed and has blind holes, which would otherwise be caused by air traps.
The purpose of the invention is to provide an improved chemical processing method which prevents occurrence of processing failures on blind holes, which would otherwise be caused by air traps.
According to one aspect of the present invention, a chemical processor comprises a chemical processing cup, in which a member-to-be-processed is to be provided, and a pumping device for circulating a liquid chemical within the chemical processing cup. the member-to-be-processed includes a surface-to-be-processed which is placed face up.
